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发明名称
Vorrichtung und Verfahren zur Belichtung eines lichtempfindlichen Substrats
摘要
申请公布号
DE69410553(T2)
申请公布日期
1998.09.17
申请号
DE19946010553T
申请日期
1994.08.01
申请人
AGFA-GEVAERT AG, 51373 LEVERKUSEN, DE
发明人
ZERTANI, RUDOLF, DR., D-55234 BECHTOLSHEIM, DE;BRONSTEIN, RAFAIL, KFAR SABA 44414, IL
分类号
G03F7/20;H05K3/00;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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