Capacitive acceleration sensor element of differential capacitor type

摘要

The sensor element consists of two glass plates (Glas1,Glas2) with metallised electrode arrangements and a spring-mass system designed using silicon micro-engineering. A seismic mass is suspended by two spring strips running parallel to the side edges and offset from each other in the z-direction. Angled openings open into the region of the connecting structures, for the spatial distribution of the connection surfaces, and using trenches and perforations etched in the silicon part. Connection contacts (10,11) are interleaved on the wafer, for the use of the connection surfaces by adjacent sensor elements.