SENSOR, IN PARTICULAR ACCELEROMETER, AND ACTUATOR, AND METHOD FOR MAKING A SENSOR OR ACTUATOR STRUCTURE WITH ELECTRIC INSULATION LOCALISED IN A SUBSTRATE PLATE

摘要

PCT No. PCT/FR97/01733 Sec. 371 Date Jul. 1, 1998 Sec. 102(e) Date Jul. 1, 1998 PCT Filed Oct. 1, 1997 PCT Pub. No. WO98/14786 PCT Pub. Date Apr. 9, 1998A sensor or actuator structure having a first part and at least one second part. The second part is mobile and electrically insulated in relation to the first part. The first and second parts are formed in a noninsulating substrate wafer and have mutually adjacent edges separated by at least one cut which goes right through the substrate. The second part has at least one extension in the form of a beam which has one end fixed onto the first part by way of an electrically insulating joint. This device may be used in an accelerometer.