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发明名称
Substrate handling and processing system for flat panel displays
摘要
申请公布号
EP0665193(B1)
申请公布日期
1998.09.16
申请号
EP19950300164
申请日期
1995.01.11
申请人
INTEVAC, INC.
发明人
COAD, GEORGE L.;HUGHES, JOHN L.;LAWSON, ERIC C.;MATTHIAS, GEORGE
分类号
C03C17/00;C23C14/50;C23C14/56;(IPC1-7):C03C17/00
主分类号
C03C17/00
代理机构
代理人
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