发明名称 Flexible continuous cathode contact circuit for electrolytic plating of C4, tab microbumps, and ultra large scale interconnects
摘要 A cathode contact device is provided for providing particle deposition from an anode source onto a target surface of a working piece. The working piece has a first electrically conductive continuous contact surrounding the target surface. The cathode contact device includes a second electrically conductive continuous contact adapted for frictionally contacting the first contact along a continuous path located on the first contact. The second contact further has an inner periphery defining an aperture for passing therethrough the particles onto the target surface. Additionally, the cathode contact device includes a circuit for electrically coupling the second contact to an electrical current supply.
申请公布号 US5807469(A) 申请公布日期 1998.09.15
申请号 US19950534489 申请日期 1995.09.27
申请人 INTEL CORPORATION 发明人 CRAFTS, DOUGLAS E.;SWAIN, STEVEN M.;TAKAHASHI, KENJI;ISHIDA, HIROFUMI
分类号 C25D5/02;C25D7/12;C25D17/06;H01L21/60;(IPC1-7):C25D17/04 主分类号 C25D5/02
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