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发明名称
MIS SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH10247730(A)
申请公布日期
1998.09.14
申请号
JP19970050080
申请日期
1997.03.05
申请人
FUJITSU LTD
发明人
NAKAMURA SHUNJI
分类号
H01L21/28;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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