| 摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive polymide precursor composition exposable with any of the i-and g-line of a mercury lamp, by incorporating a polymer composed essentially of a specified structural unit and a sensitizer. SOLUTION: This photosensitive polymide precursor composition contains the sensitizer and a polymer having a structural unit represented by the formula, in which R<1> is a 3- or 4-valent acid residue having >=2C atoms; R<2> is a specified aromatic diamine residue or the like; R<3> is -OR<4> , -NHR<4> , or -ON<+> (R<4> R<5> R<6> R<7> ) group; R<4> is a group having at least one kind of ethylenically unsaturated bond; each of R<5> -R<7> is H atom or a 1-10C hydrocarbon group; and (n) 1 or 2. The structural units of the formula have the difference obtained by taking an average electronic affinity of acid dianydride from the average ionization potential of the total diamine components in the range of 6.00-6.20eV. |
