OPTICAL THIN FILM DESIGN SYSTEM AND OPTICAL THIN FILM PRODUCTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To design thin films having always stable quality by providing the system with an inference engine for designing the optimum thin film constitution using a vapor depositable material satisfying design specifications in accordance with the data relating to the design specifications of the optical thin films, the vapor depositable materials stored in a memory means and a mathematical model of the film constitution. SOLUTION: A thin film design expert system 100 is a system to design the thin films satisfying the specifications inputted from a keyboard 304 in accordance with the instruction from a thin-film production system control section 300 inputted via an interface 105 and has the inference engine 103 to determine the thin film constitution satisfying the specifications by using the data stored in a knowledge base 101 and a data base 102. The operation of the inference engine 103 is controlled by an inference control section 104. The simulation relating to various kinds of the constitutions is executed in order to determine the thin film constitution satisfying the specifications and the optimum thin film constitution is determined by evaluating the results thereof in the thin film design expert system 100.