发明名称 BALL PRESSING METHOD AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To increase the pressing quantity of a pressing ball preventing an IC chip body from cracking, and to increase the joining strength between an Al electrode and the pressing ball by performing primary pressing in a region other than the Al electrode on the upper surface of the IC chip, and then performing secondary pressing to the Al electrode on the IC chip. SOLUTION: On the occasion of connecting an Al electrode 5 on an IC chip 6 to an external terminal, a ball is pressed against the Al electrode 5. In that case, primary pressing of a ball 3 is performed by causing a capillary 2 to descent to a region 9 other than the Al electrode 5 on the upper surface of the IC chip 6, after the ball 3 is formed at the tip of a wire 2 inserted into the capillary 2. Next, the ball 3a primarily-pressed and the capillary 2 are raised, and then the capillary 2 is caused to descend to the Al electrode 5 on the IC chip 6, and secondary pressing for joining pressing ball 3b is performed. The ball 3 formed using a discharge torch 4 for example is primarily pressed against nonwired spots in the pattern section of the IC chip 6 and the nonpatterned section.
申请公布号 JPH10242192(A) 申请公布日期 1998.09.11
申请号 JP19970042619 申请日期 1997.02.26
申请人 TANAKA DENSHI KOGYO KK 发明人 AKIMOTO HIDEYUKI
分类号 H01L21/60 主分类号 H01L21/60
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