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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH10242388(A)
申请公布日期
1998.09.11
申请号
JP19970046817
申请日期
1997.02.28
申请人
SANYO ELECTRIC CO LTD
发明人
AOYAMA MASASHIGE
分类号
H01L27/04;H01L21/822;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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