| 摘要 |
PROBLEM TO BE SOLVED: To obtain the irregularity image of the surface of a sample and the magnetic distribution image of the surface of the sample by one measurement in a scanning probe microscope. SOLUTION: A cantilever 1 is self-inducedly oscillated in the vicinity of its natural frequency. A probe 2 is magnetized by an ac current from an oscillator 24. Only signals independent from the exciting frequency of the cantilever 1 is separated from the output of an FM detector 22 by an LPF 23, their differences from a reference voltage are taken by an error amplifier 10 and used for the generation of an irregularity image. The output of the FM detector 22 is supplied to a lockin amplifier(LIA) 25, its phase is detected by the output signal of the oscillator 24, and used for the generation of a magnetic distribution image. |
