| 摘要 |
An energy dispersive type semiconductor X-ray detector includes an X-ray detection element (7) comprising a high-purity or ultra-pure silicon detection element. The X-ray detection element (7) is cooled by a small-size gas circulation system refrigerator (3), such as a pulse tube system or a Joule-Thomson system, to which it is coupled by a cold finger (5). The detector can be used with an electron microscope as an elemental analyser.
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