OPTICAL THIN-FILM PRODUCTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical thin film production system capable of automatically controlling an apparatus for production in correspondence with thin film constitution even if the physical film constitution of thin films varies. SOLUTION: This system has an expert system consisting of a thin film constitution input means 205, a thin film production knowledge base 201, a thin film production data base 202 and a thin film production inference engine 203. The thin film production inference engine determines the optimum vapor deposition conditions at the time of thin film production in an apparatus 600 for production of thin film by referencing the contents of the thin film production knowledge base and the thin film production data base in accordance the thin film constitution and the apparatus for production of the thin films is operated in accordance with the determined vapor deposition conditions.