| 摘要 |
PROBLEM TO BE SOLVED: To obtain the subject compound having crosslinking ability with a matrix polymer when used as an additive to the polymer and useful as a resist material, etc., by adding functional groups to a polymethylsilsesquioxane. SOLUTION: This silylated polymethylsilsesquioxane expressed by formula II [(k) is a positive number less than (m), an amount of residual silanol residues (m-k)/(m+n)<=0.12; R<1> to R<3> are each H or a (substituted) monovalent hydrocarbon] is obtained by silylating silanol groups in a polymethylsilsesquioxane expressed by formula I [(m) and (n) are positive number giving molecular weights.) and having 380-2000 polystyrene-reduced number average molecular weight (Mn) with a silyl group-containing compound having a crosslinkable carbon-carbon double bond. In (m) and (n) of formula I, m/(m+n) value lies in a A domain, the A domain is surrounded by each of straight lines expressed by m/(m+n)=0.152×Mn×10<-3> +0.10, 1/(Mn×10<-3> =1000/2000, 1/(Mn×10<-3> )=1000/380, m/(m+n)=0.034/(Mn×10<-3> ) in a graph expressed by 1/(Mn×10<-3> ) x-axis and m/(m+n) y-axis and contains each straight line and each cross point of the straight lines.
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