| 摘要 |
PROBLEM TO BE SOLVED: To simplify containing of a supplementary tray and recovery of an empty tray without stopping an apparatus by providing a third tray moving mechanism for transferring the empty tray from a third stage to a third tray stocker. SOLUTION: A tray stocker elevating mechanism 45 is operated, an empty tray holding rack 44 is moved down in a Z direction, and positioned at a height position H. A tray T2 is transferred from a tray mount part 61 to the rack 44 in an X1 direction by a tray traverser 62. Then, the rack 41 is raised by the mechanism 45 in the Z direction, and positioned in a space 53b of an empty tray stocker 53. The tray T2 is transferred from the rack 4 to a space 53b of the stocker 53 by a tray traverser 47. Simultaneously, a supplementary tray holding rack 43 is positioned in a space 52b of a supplementary tray stocker 52. Then, the tray is transferred from the space 52b of the stocker 52 to the rack 43 in the X2 direction. |
