| 摘要 |
PROBLEM TO BE SOLVED: To cope with a high energy line. SOLUTION: A metallic mold 10 is manufactured by cutting a 10mm thick cupper plate with a cutting machine. Further, a film of fluorine resin 11 is formed as a mold releasing agent on the surface of the metallic mold 10 so that a thickness thereof accurately becomes 0.1μm, and then, the metallic mold is set within a press 12. Next, a quartz substrate 13, which is used as an element material, is prepared and a high polymer film 14 consisting of polymethyl methacrylate is applied on one side thereof so that the thickness thereof becomes 0.7μm. When this quartz substrate 13 is set within the press 12, when the temperature thereof is raised to 130 deg.C, and when the press molding is carried out by using the metallic mold 10 in the nitrogen atmosphere, the shape of the metallic mold 10 is transferred on the high polymer film 14. Thereafter, the quartz substrate 13 is set within a reactive ion etching device after cooled to the room temperature, and etching is executed until a resist is etched by an etching gas 15 consisting of CF4 . As a result, a binary optics element 16, in which the blazed shape is transferred to the quartz substrate 13 by etching as shown in a figure (c), is obtained.
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