| 摘要 |
PROBLEM TO BE SOLVED: To carry out continuous exhaust operation with good efficiency without interrupting by arranging two bellows independently freely to expand and contract, and controlling operation of either one of two air chambers so as to be an expansion condition at all times. SOLUTION: By intake/exhaust means 170, a movable plate 130 is drawn near to a fixing plate 110 side while contracting a bellows 140 when same directional magnetic fields are generated on a fixing coil 161 and a movable coil 162, an air chamber 150 is made into a compressed condition, and a fluid is delivered from a delivery port valve 122. In the case where a magnetic field of a reverse direction is generated, the air camber 150 is made into an expansion condition, and the fluid is sucked from an intake inlet valve 121. Two means 170A, 170B of the intake/exhaust means 170 are connected to each other in parallel, the intake/exhaust means 170B are made into an exhaust condition at the intake time of the intake/exhaust means 170A. Succeedingly, at the intake time where a movable plate 130 of the intake/exhaust means 170B is rotated inversely, the movable plate 130 of the intake/exhaust means 170A is rotated inversely into an exhaust condition, and one of two air chambers 150 are made into an expansion condition at all times so as to carry out exhaust continuously. |
