| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify the structure of a heating mechanism for enhancing the thermal responsiveness, by a method wherein an electrode expanding after a pattern serving both for electrostatic adsorption and a heater is formed on the upper side of a substrate. SOLUTION: In an electrostatic chuck 1, a pair of electrodes 5a, 5b are formed on a substrate 6 after a pattern to be covered with a dielectric layer 4. Next, the terminals 7a1, 7a2, 7b1, 7b2 are fitted to respective electrode patterns 5a, 5b for connecting the terminals to power supplies 9a, 9b for heater for composing respective closed circuits 11a, 11b to be connected to DC high voltage power supplies 17a, 17b mutually in inverse polarities through the intermediary of respective connecting wires 13a, 13b and low path filters 15a, 15b. In such a constitution, respective electrode patterns 15a, 15b can serve both for the electrostatic adsorption and a heater.</p> |
