发明名称 Device having a self-aligned gate electrode wrapped around the channel
摘要 A semiconductor device includes an insulating support. A strip of semiconductor material has two ends in contact with the insulating support and a midsection extending between the ends. A dielectric layer encircles the midsection, and a conductive layer encircles the dielectric layer. The conductive layer has a substantially constant width such that a gate electrode formed within the conductive layer is fully self-aligned with drain and source regions formed within the ends.
申请公布号 US5801397(A) 申请公布日期 1998.09.01
申请号 US19950452893 申请日期 1995.05.30
申请人 SGS-THOMSON MICROELECTRONICS, INC. 发明人 CUNNINGHAM, JAMES A.
分类号 H01L21/265;H01L21/336;H01L29/423;H01L29/786;(IPC1-7):H01L29/76;H01L31/036;H01L27/01;H01L27/12 主分类号 H01L21/265
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