ACCELERATION SENSOR ELEMENT AND METHOD OF ITS MANUFACTURE

摘要

The present invention is directed to a flexure transducer element which is used in an acceleration sensor for sensing an acceleration applied thereto. The flexure transducer element comprises (1) a frame, (2) a sheet member which has a plurality of flexible parts and a center part, (3) a weight which has a neck part integrally connected to the center part of the sheet member and which is hung from the sheet member through the neck part, and (4) a support member which supports the lower surface of the frame. The flexure transducer element is used for the semiconductor acceleration sensor in an automobile, aircraft or domestic electric appliance.