TUNING FORK GYRO WITH SPLIT ELECTRODE

摘要

A micromechanical tuning fork gyro having two center electrodes (9a, 9b). The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses (3a, 3b) are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes equal, hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does not effect sense axis output signals.