发明名称 Mass spectrometer with plasma ion source
摘要 The mass spectrometer has the plasma provided by the plasma ion source (40) used for ionisation of the sample, directed to a mass filter (60) via an interface (50) providing a conical exit opening. A cooling device (49) is used for cooling the plasma generator (41) of the plasma ion source and a plasma generator voltage source (44), a second independent cooling device (56) using a circulated cooling medium, used for cooling the interface.
申请公布号 DE19807402(A1) 申请公布日期 1998.08.27
申请号 DE19981007402 申请日期 1998.02.19
申请人 HITACHI, LTD., TOKIO/TOKYO, JP 发明人 OKUMOTO, TOYOHARU, HITACHINAKA, IBARAKI, JP;TSUKADA, MASAMICHI, IBARAKI, JP;OWADA, AKIRA, HITACHINAKA, IBARAKI, JP
分类号 G01N27/62;H01J49/04;H01J49/10;(IPC1-7):H01J49/00 主分类号 G01N27/62
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