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发明名称
LASER STRIPPING IMPROVEMENT BY MODIFIED GAS COMPOSITION
摘要
申请公布号
EP0859684(A1)
申请公布日期
1998.08.26
申请号
EP19960935311
申请日期
1996.11.04
申请人
ORAMIR SEMICONDUCTOR EQUIPMENT LTD.
发明人
LIVSHITS (BUYANER), BORIS;GENUT, MENACHEM;TEHAR-ZAHAV, OFER
分类号
B23K26/12;G03F7/42;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):B23K26/12
主分类号
B23K26/12
代理机构
代理人
主权项
地址
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