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发明名称
Diagnostic wafer
摘要
申请公布号
EP0709874(B1)
申请公布日期
1998.08.26
申请号
EP19950117154
申请日期
1995.10.31
申请人
APPLIED MATERIALS, INC.
发明人
LOEWENHARDT, PETER K.;HANAWA, HIROJI;YIN, GERALD ZHEYAO
分类号
H05H1/00;H01J37/32;H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):H01J37/244
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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