| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a fluid control device which attains integration without increasing number of kinds of opening/closing valves as main components. SOLUTION: A breaking and releasing unit 91 arranged on a port of a fluid controller is selected from a breaking and releasing unit 91 provided with one two-port valve 101, a breaking and releasing unit 92 provided with one two-port valve 101 and one three-port valve 102, a breaking and releasing unit 93 provided with one two-port valve 101 and two three-port valves 102, a breaking and releasing unit 94 provided with two three-port valves 102, a breaking and releasing unit 95 provided with three three-port valves 102. Valve bodies 101a of the two-port valves 101 of the breaking and releasing units 91, 92, 93 have the same shape each provided with an inlet 103 and an outlet 104 on the lower surface. Valve bodies 102a of the three-port valves 102 of the breaking and releasing units 92, 93, 94, 95 have the same shape each provided with an inlet 107 and an outlet 106 always communicated with each other, and a sub-outlet 105 on the lower surface.</p> |
