| 摘要 |
PROBLEM TO BE SOLVED: To prevent the vibration of a supporting body side in all the frequency domain by accurately applying the liquid-tight sealing to a load sensor which detects the residual vibration in the supporting body side. SOLUTION: In this equipment, gel-like silicone resin 78 is filled in the space surrounded by a yoke 52a and a cover member 57, where a load sensor 54 is sandwiched between them, inside an equipment case 43. Therefore, the centering of water from the exterior of the equipment into the load sensor 54 can be cut-off without fail by the gel-like silicone resin 78. Further, as a ring-shaped protrusion 72 formed on the lower surface 52a1 of the yoke 52a and a ring- shaped protrusion 76 formed on a bottom cover 58 contact the upper and the lower pressure plates of the load sensor 54 respectively without interposing the gel-like silicone resin 78 in between, the load sensor 54 can always detect the residual vibration accurately. |
