Device for processing semiconductor wafers, comprising at least one processing chamber which is completely closed with the exception of a connection to a distributing system. In said at least one processing chamber there are situated preferably two reactors and a common feed/removal system in order to be able to subject wafers, which may optionally be arranged in boats, to an identical processing operation.
申请公布号
WO9836444(A1)
申请公布日期
1998.08.20
申请号
WO1998NL00055
申请日期
1998.01.27
申请人
ASM INTERNATIONAL N.V.;GRANNEMAN, ERNST, HENDRIK, AUGUST;HASPER, ALBERT;ZINGER, JAN
发明人
GRANNEMAN, ERNST, HENDRIK, AUGUST;HASPER, ALBERT;ZINGER, JAN