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发明名称
摘要
申请公布号	JP2787535(B2)	申请公布日期	1998.08.20
申请号	JP19930284499	申请日期	1993.10.18
申请人	NAKADA JOSUKE	发明人	NAKADA JOSUKE
分类号	C30B13/06;C30B29/60;C30B30/08;H01L27/146;H01L31/10;(IPC1-7):C30B29/60	主分类号	C30B13/06
代理机构		代理人
主权项
地址

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