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发明名称
Wet processing system
摘要
申请公布号
GB2291740(B)
申请公布日期
1998.08.19
申请号
GB19950014921
申请日期
1995.07.20
申请人
* NEC CORPORATION
发明人
HIROJUKI * SUGIUTI
分类号
C23F1/08;H01L21/304;H01L21/306;H01L21/673;(IPC1-7):H01L21/00
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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