发明名称 Bandpass photon detector
摘要 <p>Apparatus for bandpass photon detection (300, 400) containing a lens (302, 402) for collimating input light, a bandpass filter element (304, 404), and an optical signal detector (306, 406). Light passes from a source into the lens which collimates the light which then is incident upon the filter. The filter is tuned to a particular band of wavelengths, such that out of all of the wavelengths that are incident upon the front side of the filter, a wavelength band is propagated through the filter and passes from the filter to the photomultiplier detector, such that the output of the photomultiplier detector is a voltage level representing the energy content within that wavelength band. In various alternative embodiments, the bandpass photon detectors are arranged in a number of cascade arrangements such that multiple wavelength bands are simultaneously detected. &lt;IMAGE&gt; &lt;IMAGE&gt;</p>
申请公布号 EP0859250(A1) 申请公布日期 1998.08.19
申请号 EP19980300631 申请日期 1998.01.29
申请人 APPLIED MATERIALS, INC. 发明人 SUI, ZHIFENG;LUSCHER, PAUL E.
分类号 G01J3/443;G01J1/04;G01J1/42;G01N21/25;G01N21/71;G02B6/34;H01L31/12;H05H1/00;(IPC1-7):G02B6/34;G01N21/73 主分类号 G01J3/443
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