发明名称 CONVEYING METHOD FOR THIN SHEET WORK
摘要 PROBLEM TO BE SOLVED: To provide a conveying method for a thin plate work to transfer it to and from an exposing position without containing a conveying device with the upper surface of a thin sheet-from work. SOLUTION: This conveying method for a thin sheet work comprises placing the thin sheet work 22 on the upper part of a roller conveyor 21 arranged on the input side, removing it toward an exposing part 25, receiving the work 22 under removing on the upper part of a belt conveyor 23 arranged at the exposing part 25 and transferring the work 22 to a position above an exposing surface plate 24, lowering the belt conveyor 23 and transferring the work 22 on the upper surface of the exposing surface plate 24. After exposure, the belt conveyor 23 is raised and the work 22 is received on the belt conveyor 23, lifted to a position above the exposing surface plate 24, and the lifted work 22 is placed on the upper part of the belt conveyor 23 and transferred from the exposing part. The work 22 under transferring is then received on the upper part of a roller conveyor 85 arranged on the outlet side and transferred.
申请公布号 JPH10218353(A) 申请公布日期 1998.08.18
申请号 JP19970024648 申请日期 1997.02.07
申请人 ORC MFG CO LTD 发明人 KANBE KEIICHI;UJIMASU MINORU
分类号 G03F7/20;B65G47/52;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):B65G47/52 主分类号 G03F7/20
代理机构 代理人
主权项
地址
您可能感兴趣的专利