Probe scanner for raster probe microscope

摘要

The scanner has a scanner unit to which a shaft transmits a force to a probe (10) from at least one oscillating coil motor located in an x-direction and one located in a y-direction. It has a selector appliance (52) which employs a metal (62) with a low melting point to provide a selective coupling of a flexible component (51) with the shaft (27). coupling the flexible component and shaft with the control appliance enables a zoom operation to be performed. The control appliance can consist of a cylinder enclosing the metal component with a heater on its outer periphery and the shaft passing through the low melting point metal