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发明名称
HALTERUNG FÜR EINE TASTSPITZE EINES RASTERKRAFT- ODER RASTERTUNNELMIKROSKOPS
摘要
申请公布号
DE59406427(D1)
申请公布日期
1998.08.13
申请号
DE19945006427
申请日期
1994.11.09
申请人
FORSCHUNGSZENTRUM JUELICH GMBH, 52428 JUELICH, DE
发明人
SAURENBACH, FRANK, D-52134 HERZOGENRATH, DE;FUSS, HANS-ACHIM, D-52428 JUELICH, DE
分类号
G01B7/34;G01N27/00;(IPC1-7):G01B7/34
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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