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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH10214795(A)
申请公布日期
1998.08.11
申请号
JP19970013822
申请日期
1997.01.28
申请人
FUJITSU LTD
发明人
HAYASHI HIROMI
分类号
H01L21/28;H01L21/768;H01L23/522;H01L29/78;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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