SUBSTRATE TREATING DEVICE,申请号JP19970028269-传众专利搜索

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发明名称	SUBSTRATE TREATING DEVICE
摘要
申请公布号	JPH10214763(A)	申请公布日期	1998.08.11
申请号	JP19970028269	申请日期	1997.01.29
申请人	CANON INC	发明人	MATSUO MANABU
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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