| 摘要 |
<p>PROBLEM TO BE SOLVED: To miniaturize a device by arranging three fine-movement devices at a base with an equal interval, combining the operation of the X-directional fine-movement device and the positive and negative operations of two Y- directional fine-movement devices, and performing the XYθdirectional positioning of a table. SOLUTION: Fine-move devices 2, 1, and 3 are arranged on a straight line on the lower surface of a base 5 at an equal interval, and the fine-movement devices 2, 1, and 3 are moved on the base 5 in Y, X, and Y directions, respectively. For example, when the base 5 is moved in X+ and X-directions, the fine- movement device 1 is subjected to + and - operations. When the base 5 is moved in Y+ and Y- directions, the fine movement devices 2 and 3 are both subjected to + and - operations. Also, when the base 5 is moved inθ+ direction, the fine-movement devices 2 and 3 are subjected to + and - operations, respectively. When the base 5 is moved inθ-direction, the fine-movement devices 2 and 3 are subjected to - and + operations, respectively. Position coordinates are judged, for example, by image recognition and CRT screen and the operations of the fine-movement devices 1-3 are combined, thus moving a table 4 to a target position.</p> |
