| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor whose relative sensitivity (detecting sensitivity) is increased by using a tuning fork-type quartz oscillator. SOLUTION: This angular velocity sensor is constituted such that the X-axis of a crystallographic axis (XY'Z') to be set at the Z-axis by being turned by θ deg. from the Y-axis around the X-axis of a crystallographic axis (XYZ) is used as a width, that the Y'-axis is used as a length, that the Z'-axis is used as a thickness, that a tuning fork-shaped quartz body 5 which comprises a base part 2 and of one pair of arm parts 3, 4 which are extended to the length direction from the base part 2 and which are divided by a groove part is formed, that driving electrodes 6, 7 are installed at the front and rear faces (X-Y' face) and the right and left faces (Y'-Z' face) of the pair of arm parts, that the pair of arm parts are tuning-fork-vibrated in the X-axis direction, that sensor electrodes 8, 9 are installed on both sides as the inside and the outside of the respective front and rear faces at the pair of arm parts and that vertical vibrations caused by the Coriolis force in mutually opposite directions in the Z-axis direction are detected. In this case, the driving electrodes are formed up to the upper end side from the root side of the respective arm parts which are extended from the base part, and the sensor electrodes are constituted so as to be arranged on both sides of the driving electrodes on the front and rear faces of the respective arm parts. |
