| 摘要 |
PROBLEM TO BE SOLVED: To stably produce a micro piezoelectric element with sufficient piezoelectric characteristic by forming a pair of electrodes on both surfaces facing a thin film piezoelectric body with a specific thickness, and forming a covering layer with a specific thickness which shows no piezoelectric characteristic, on the surface of one of the electrodes. SOLUTION: A cantilever piezoelectric element is formed by bonding lower and upper electrodes 2 and 3 with a thickness of 0.1μm to the upper and lower sides of a thin-film piezoelectric body 1 with a thickness of 0.05-100μm. Further a covering layer 4 with a thickness of 0.05-500μm showing no piezoelectric characteristic is formed on the surface of the upper electrode 3. The body 1 comprises mainly of perovskite oxide containing lead, titanium and zirconium. The covering layer 4 comprising polyimide protects the weak body 1. When a voltage is applied, the lower part of the body 1 is elongated in the x-direction, however, since the upper part thereof is covered with the covering layer 4, the tip end of the element moves vertically in z-direction. In case where the respective thickness is within the range, this method is practical in terms of machinability. |
