| 摘要 |
PROBLEM TO BE SOLVED: To provide a sliding member capable of not only improving wear resistance and corrosion resistance of a sliding member to be arranged on a transfer robot but also preventing corrosion due to a burst inside a vacuum chamber and corrosion due to corrosive gas. SOLUTION: In a transfer robot 1, a robot hand 3 being rotatably arranged on a machine base 2 and a robot hand 3 consisting of a first arm 5, a second arm 7 and a hand 9 are arranged. The first arm 5 and the second arm 7 are slidably connected through a magnetic shield bearing and the second arm 7 and the hand 9 are slidably connected through the magnetic shield bearing. As to the magnetic shield bearing, a thin film layer made of an inorganic material or an organic material is formed by a CVD method or PVD method. |
