| 摘要 |
PROBLEM TO BE SOLVED: To reduce the amount of scattered particles generated from the target of a laser plasma X-ray source which is used as a light source by forming the target of a material composed of a plurality of elements containing one or more kinds of metals. SOLUTION: The fundamental wave 12 of an YAG laser is condensed so that the wave 12 can form a spot on the tape-like target 11 of a laser plasma X-ray source and made incident to the target 11 at an angle of 45 deg.C from the normal line to the surface of the target 11. The target 11 is made of a solid solution of a metal, such as Th, Fe, etc. Consequently, the amount of scattered particles 15 generated together with X rays 14 on an Si wafer 13 can be reduced. Therefore, the running cost of a laser plasma X-ray generator can be reduced to a half, because the replacement interval of an optical element installed on the downstream side of the target 11 can be prolonged ten times as long as the conventional example. |
