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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10209439(A)
申请公布日期
1998.08.07
申请号
JP19970008924
申请日期
1997.01.21
申请人
NEC CORP
发明人
KODAMA NORIYUKI
分类号
H01L29/78;H01L21/336;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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