| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing end point detecting method capable of detecting the polishing end point with high sensitivity and stability through a simplified method. SOLUTION: With regard to a polishing method of polishing a polishing object to a flat and mirrorlike surface by pressing a top ring 13 retaining the polishing object against a polishing cloth 11 stuck to a rotating turntable 12 and rotating the turntable 12 together with the top ring 13, variation of the polishing resisting force produced when polishing of the polishing object reaches a dissimilar material, or variation of the polishing resistance force produced when unevenness is removed at the time of flattening the surface unevenness is detected by the variation of electric power W inputted in the turnatable 12 or the top ring 13 drive motors 15, 16. |
