发明名称 Lateral semiconductor device with maximized breakdown voltage, and methods of fixing potentials of same
摘要 A lateral semiconductor device with enhanced breakdown characteristics includes a semiconductor substrate composite of first and second semiconductor substrates bonded to one another via an oxide film. An insulation film is buried in a separation trench which extends from a major surface of the first semiconductor substrate to the oxide film. An element region of greater than 10 mu m in thickness is isolated by the separation trench from other element regions. First and second diffusion regions of opposite conductivity type are formed on the element region. The potential of the second substrate is fixed at one-third of the designed maximum breakdown voltage of the lateral semiconductor device. Alternatively, if the element region is 10 mu m or less in thickness, the potential of the second substrate is fixed at one-half of the designed maximum breakdown voltage of the lateral semiconductor device.
申请公布号 US5789782(A) 申请公布日期 1998.08.04
申请号 US19970794146 申请日期 1997.02.03
申请人 FUJI ELECTRIC CO., LTD. 发明人 MATSUZAKI, KAZUO
分类号 H01L21/762;H01L29/861;(IPC1-7):H01L27/01;H01L23/58 主分类号 H01L21/762
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