| 摘要 |
Input image data is wavelet-transformed in correspondence with each position on its frame (S1), a combination image area of X-axis (or Y-axis) high-pass information and Y-axis (or X-axis) low-pass information in the transformed image data is subjected to binary processing (S3), an isolated point is removed from the binary image data (S4), after which the number of pixels of a value "1" is counted (S5), and the device under test is judged as non-defective or defective, depending on whether the count value is larger than a predetermined value (S7).
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