MOLD FOR FINE PROCESSING BY TRANSFER AND PRODUCTION THEREOF,申请号JP19970014088-传众专利搜索

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发明名称	MOLD FOR FINE PROCESSING BY TRANSFER AND PRODUCTION THEREOF
摘要
申请公布号	JPH10202741(A)	申请公布日期	1998.08.04
申请号	JP19970014088	申请日期	1997.01.28
申请人	NIKON CORP	发明人	SUGIMURA HIROYUKI
分类号	B29C59/04;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):B29C59/04;H01L21/306	主分类号	B29C59/04
代理机构		代理人
主权项
地址

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