| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to efficiently remove impurities in an electrolyte contg. zinc ions and nitric acid ions without exerting a significant influence on liquid phase deposition conditions by providing the lower part of a liquid phase deposition vessel with an impurity settling vessel and disposing a partition plate having holes of the diameter gradually decreasing from the deposition vessel side toward the impurity settling vessel side between the liquid phase deposition vessel and the impurity settling vessel. SOLUTION: A current is supplied between a conductive substrate 203 as a cathode and a soluble and insoluble anode metal 204 consisting of zinc, platinum, etc., by a power source 206 to form the thin film of zinc oxide on the surface of the substrate 203 in an electrolyte 202 contg. zinc ions, nitric acid ions and carbohydrate, such as saccharose. The lower part of an electrolyte container 201 is provided with the impurity settling vessel 206 and a partition plate 207 having holes is disposed at the boundary thereof, thereby the impurities are settled and removed. If necessary, the circulating route of the electrolyte 202 is provided with a filter to filter away the impurities in the electrolyte and to generate vortexes in the electrolyte in the electrolyte container 201, by which the adhesion of the impurities to the surface of the substrate 203 is prevented. |
