| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive cloth dressing method allowing to simultaneously accomplish configuration straighting for better flatness of the abrasive cloth and groove establishing for supplying and retaining polishing liquid and slurry. SOLUTION: Dressing is accomplished by pressing a ring shaped dresser grinding stone 2, which includes a smaller outside diameter than the width W of an annulus ring shape application area of an abrasive cloth 1, against the abrasive cloth 1 as rotating it and giving the dresser grinding stone 2 a reciprocating motion in the radial direction of the abrasive cloth 1 on the application area W as rotating the abrasive cloth 1. In such case, simultaneously as the abrasive cloth 1 is flattened, a concentrical groove is generated by dressing the abrasive cloth 1 upon establishing the moving speed of the dresser grinding stone 2 so that it will be a constant moving quantity more than 2/3 of the outside diameter of the dresser grinding stone 2 per rotation of the abrasive cloth 1 but less than the value subtracting 1/2 of the width value of the dresser grinding stone 2 from the outside diameter value of the dresser grinding stone 2. |
