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发明名称
SENSING APPARATUS OF WAFER SENDING APPARATUS
摘要
申请公布号
KR0119297(Y1)
申请公布日期
1998.08.01
申请号
KR19940036957U
申请日期
1994.12.28
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
JUNG, KIL-JONG;KIM, KWANG-SUNG;JIN, KI-HYUN
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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