| 摘要 |
PROBLEM TO BE SOLVED: To relax the sharp difference of the physical properties of a material in the joining section of a piezoelectric body section and a vibrating section, and to inhibit the generation of residual stress, by joining the vibrating section and the piezoelectric body section through an intermediate section consisting of a sintered body, with which the sintering material of the vibrating section and the sintering material of the piezoelectric body section are mixed. SOLUTION: Piezoelectric-material powder is charged into an annular piezoelectric body forming recess formed of a front mold and a sintering die, and a piezoelectric- material powder layer 31 is formed, first mixed powder is charged onto the top face of the layer 31 and a first mixed-powder layer 32a in the same thickness as the piezoelectric-material powder layer 31 is formed, a second mixed powder is charged onto the top face of the first mixed-powder layer 32a, and a second mixed-powder layer 32b in the same thickness as the piezoelectric-material powder layer 31 is shaped. A third mixed powder is charged onto the top face of the second mixed-powder layer 32b and a third mixed-powder layer 32c is formed, and vibrating-material powder is loaded to the front mold 23 and a vibrating-material powder layer 33 is formed. The powder of each layer is changed into sintered bodies by a pressure process and a pulse-voltage applying process. |
