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发明名称	BASE BOARD OF INSPECTING HEAD
摘要
申请公布号	JPH10197561(A)	申请公布日期	1998.07.31
申请号	JP19970014828	申请日期	1997.01.13
申请人	MICRONICS JAPAN CO LTD	发明人	KATO HIROSHI
分类号	G01R1/073;H01L21/66;(IPC1-7):G01R1/073	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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